JPS5636567B2 - - Google Patents

Info

Publication number
JPS5636567B2
JPS5636567B2 JP11576073A JP11576073A JPS5636567B2 JP S5636567 B2 JPS5636567 B2 JP S5636567B2 JP 11576073 A JP11576073 A JP 11576073A JP 11576073 A JP11576073 A JP 11576073A JP S5636567 B2 JPS5636567 B2 JP S5636567B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11576073A
Other languages
Japanese (ja)
Other versions
JPS5068065A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11576073A priority Critical patent/JPS5636567B2/ja
Publication of JPS5068065A publication Critical patent/JPS5068065A/ja
Publication of JPS5636567B2 publication Critical patent/JPS5636567B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11576073A 1973-10-17 1973-10-17 Expired JPS5636567B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11576073A JPS5636567B2 (cs) 1973-10-17 1973-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11576073A JPS5636567B2 (cs) 1973-10-17 1973-10-17

Publications (2)

Publication Number Publication Date
JPS5068065A JPS5068065A (cs) 1975-06-07
JPS5636567B2 true JPS5636567B2 (cs) 1981-08-25

Family

ID=14670355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11576073A Expired JPS5636567B2 (cs) 1973-10-17 1973-10-17

Country Status (1)

Country Link
JP (1) JPS5636567B2 (cs)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539672A (en) * 1978-09-14 1980-03-19 Fujitsu Ltd Manufacturing semiconductor device
JPS5615080A (en) * 1979-07-18 1981-02-13 Fujitsu Ltd Mos type field effect transistor
JPS5667966A (en) * 1979-11-07 1981-06-08 Nec Corp Semiconductor device and preparation method thereof
JPS56101757A (en) * 1980-01-18 1981-08-14 Mitsubishi Electric Corp Manufacture of semiconductor device
JP2749019B2 (ja) * 1991-06-14 1998-05-13 シャープ株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5068065A (cs) 1975-06-07

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