JPS5087283A - - Google Patents

Info

Publication number
JPS5087283A
JPS5087283A JP48136539A JP13653973A JPS5087283A JP S5087283 A JPS5087283 A JP S5087283A JP 48136539 A JP48136539 A JP 48136539A JP 13653973 A JP13653973 A JP 13653973A JP S5087283 A JPS5087283 A JP S5087283A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48136539A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48136539A priority Critical patent/JPS5087283A/ja
Publication of JPS5087283A publication Critical patent/JPS5087283A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Bipolar Transistors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP48136539A 1973-12-03 1973-12-03 Pending JPS5087283A (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48136539A JPS5087283A (cs) 1973-12-03 1973-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48136539A JPS5087283A (cs) 1973-12-03 1973-12-03

Publications (1)

Publication Number Publication Date
JPS5087283A true JPS5087283A (cs) 1975-07-14

Family

ID=15177542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48136539A Pending JPS5087283A (cs) 1973-12-03 1973-12-03

Country Status (1)

Country Link
JP (1) JPS5087283A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138840A (en) * 1979-04-17 1980-10-30 Nec Kyushu Ltd Method of fabricating semiconductor device
JPS5633833A (en) * 1979-08-29 1981-04-04 Fujitsu Ltd Formation of positioning mark
JPH04367235A (ja) * 1991-06-14 1992-12-18 Sharp Corp 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138840A (en) * 1979-04-17 1980-10-30 Nec Kyushu Ltd Method of fabricating semiconductor device
JPS5633833A (en) * 1979-08-29 1981-04-04 Fujitsu Ltd Formation of positioning mark
JPH04367235A (ja) * 1991-06-14 1992-12-18 Sharp Corp 半導体装置の製造方法

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