JPS5636227B2 - - Google Patents

Info

Publication number
JPS5636227B2
JPS5636227B2 JP11578973A JP11578973A JPS5636227B2 JP S5636227 B2 JPS5636227 B2 JP S5636227B2 JP 11578973 A JP11578973 A JP 11578973A JP 11578973 A JP11578973 A JP 11578973A JP S5636227 B2 JPS5636227 B2 JP S5636227B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11578973A
Other languages
Japanese (ja)
Other versions
JPS5066449A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11578973A priority Critical patent/JPS5636227B2/ja
Publication of JPS5066449A publication Critical patent/JPS5066449A/ja
Publication of JPS5636227B2 publication Critical patent/JPS5636227B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP11578973A 1973-10-17 1973-10-17 Expired JPS5636227B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11578973A JPS5636227B2 (enrdf_load_stackoverflow) 1973-10-17 1973-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11578973A JPS5636227B2 (enrdf_load_stackoverflow) 1973-10-17 1973-10-17

Publications (2)

Publication Number Publication Date
JPS5066449A JPS5066449A (enrdf_load_stackoverflow) 1975-06-04
JPS5636227B2 true JPS5636227B2 (enrdf_load_stackoverflow) 1981-08-22

Family

ID=14671095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11578973A Expired JPS5636227B2 (enrdf_load_stackoverflow) 1973-10-17 1973-10-17

Country Status (1)

Country Link
JP (1) JPS5636227B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02112119U (enrdf_load_stackoverflow) * 1989-02-28 1990-09-07
JP2023075223A (ja) * 2021-08-04 2023-05-30 株式会社エスケーエレクトロニクス パターン修正方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57112018A (en) * 1980-12-29 1982-07-12 Fujitsu Ltd Correction of pattern
CN115704993A (zh) * 2021-08-04 2023-02-17 株式会社Sk电子 图案修正方法以及光掩模
JP7489359B2 (ja) * 2021-08-04 2024-05-23 株式会社エスケーエレクトロニクス パターン修正方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02112119U (enrdf_load_stackoverflow) * 1989-02-28 1990-09-07
JP2023075223A (ja) * 2021-08-04 2023-05-30 株式会社エスケーエレクトロニクス パターン修正方法

Also Published As

Publication number Publication date
JPS5066449A (enrdf_load_stackoverflow) 1975-06-04

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