JPS5635519B2 - - Google Patents
Info
- Publication number
- JPS5635519B2 JPS5635519B2 JP13631676A JP13631676A JPS5635519B2 JP S5635519 B2 JPS5635519 B2 JP S5635519B2 JP 13631676 A JP13631676 A JP 13631676A JP 13631676 A JP13631676 A JP 13631676A JP S5635519 B2 JPS5635519 B2 JP S5635519B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Discharge Of Articles From Conveyors (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13631676A JPS5362364A (en) | 1976-11-15 | 1976-11-15 | Apparatus for washing sheet-shaped article |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13631676A JPS5362364A (en) | 1976-11-15 | 1976-11-15 | Apparatus for washing sheet-shaped article |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5362364A JPS5362364A (en) | 1978-06-03 |
JPS5635519B2 true JPS5635519B2 (cs) | 1981-08-18 |
Family
ID=15172350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13631676A Granted JPS5362364A (en) | 1976-11-15 | 1976-11-15 | Apparatus for washing sheet-shaped article |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5362364A (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0238006Y2 (cs) * | 1985-02-07 | 1990-10-15 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56168072A (en) * | 1980-05-30 | 1981-12-24 | Hitachi Ltd | Steam drying method and apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4735314U (cs) * | 1971-05-12 | 1972-12-19 | ||
JPS4914585A (cs) * | 1972-05-20 | 1974-02-08 |
-
1976
- 1976-11-15 JP JP13631676A patent/JPS5362364A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4735314U (cs) * | 1971-05-12 | 1972-12-19 | ||
JPS4914585A (cs) * | 1972-05-20 | 1974-02-08 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0238006Y2 (cs) * | 1985-02-07 | 1990-10-15 |
Also Published As
Publication number | Publication date |
---|---|
JPS5362364A (en) | 1978-06-03 |