JPS5635519B2 - - Google Patents

Info

Publication number
JPS5635519B2
JPS5635519B2 JP13631676A JP13631676A JPS5635519B2 JP S5635519 B2 JPS5635519 B2 JP S5635519B2 JP 13631676 A JP13631676 A JP 13631676A JP 13631676 A JP13631676 A JP 13631676A JP S5635519 B2 JPS5635519 B2 JP S5635519B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13631676A
Other languages
Japanese (ja)
Other versions
JPS5362364A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13631676A priority Critical patent/JPS5362364A/ja
Publication of JPS5362364A publication Critical patent/JPS5362364A/ja
Publication of JPS5635519B2 publication Critical patent/JPS5635519B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Discharge Of Articles From Conveyors (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP13631676A 1976-11-15 1976-11-15 Apparatus for washing sheet-shaped article Granted JPS5362364A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13631676A JPS5362364A (en) 1976-11-15 1976-11-15 Apparatus for washing sheet-shaped article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13631676A JPS5362364A (en) 1976-11-15 1976-11-15 Apparatus for washing sheet-shaped article

Publications (2)

Publication Number Publication Date
JPS5362364A JPS5362364A (en) 1978-06-03
JPS5635519B2 true JPS5635519B2 (cs) 1981-08-18

Family

ID=15172350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13631676A Granted JPS5362364A (en) 1976-11-15 1976-11-15 Apparatus for washing sheet-shaped article

Country Status (1)

Country Link
JP (1) JPS5362364A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238006Y2 (cs) * 1985-02-07 1990-10-15

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56168072A (en) * 1980-05-30 1981-12-24 Hitachi Ltd Steam drying method and apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735314U (cs) * 1971-05-12 1972-12-19
JPS4914585A (cs) * 1972-05-20 1974-02-08

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735314U (cs) * 1971-05-12 1972-12-19
JPS4914585A (cs) * 1972-05-20 1974-02-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238006Y2 (cs) * 1985-02-07 1990-10-15

Also Published As

Publication number Publication date
JPS5362364A (en) 1978-06-03

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