JPS5362364A - Apparatus for washing sheet-shaped article - Google Patents

Apparatus for washing sheet-shaped article

Info

Publication number
JPS5362364A
JPS5362364A JP13631676A JP13631676A JPS5362364A JP S5362364 A JPS5362364 A JP S5362364A JP 13631676 A JP13631676 A JP 13631676A JP 13631676 A JP13631676 A JP 13631676A JP S5362364 A JPS5362364 A JP S5362364A
Authority
JP
Japan
Prior art keywords
shaped article
sheet
washing sheet
shaped
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13631676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5635519B2 (cs
Inventor
Soichi Tsuuzawa
Itaru Jiyounomae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13631676A priority Critical patent/JPS5362364A/ja
Publication of JPS5362364A publication Critical patent/JPS5362364A/ja
Publication of JPS5635519B2 publication Critical patent/JPS5635519B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Discharge Of Articles From Conveyors (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP13631676A 1976-11-15 1976-11-15 Apparatus for washing sheet-shaped article Granted JPS5362364A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13631676A JPS5362364A (en) 1976-11-15 1976-11-15 Apparatus for washing sheet-shaped article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13631676A JPS5362364A (en) 1976-11-15 1976-11-15 Apparatus for washing sheet-shaped article

Publications (2)

Publication Number Publication Date
JPS5362364A true JPS5362364A (en) 1978-06-03
JPS5635519B2 JPS5635519B2 (cs) 1981-08-18

Family

ID=15172350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13631676A Granted JPS5362364A (en) 1976-11-15 1976-11-15 Apparatus for washing sheet-shaped article

Country Status (1)

Country Link
JP (1) JPS5362364A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56168072A (en) * 1980-05-30 1981-12-24 Hitachi Ltd Steam drying method and apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735314U (cs) * 1971-05-12 1972-12-19
JPS4914585A (cs) * 1972-05-20 1974-02-08

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735314U (cs) * 1971-05-12 1972-12-19
JPS4914585A (cs) * 1972-05-20 1974-02-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56168072A (en) * 1980-05-30 1981-12-24 Hitachi Ltd Steam drying method and apparatus

Also Published As

Publication number Publication date
JPS5635519B2 (cs) 1981-08-18

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