JPS5634057B2 - - Google Patents
Info
- Publication number
- JPS5634057B2 JPS5634057B2 JP3001275A JP3001275A JPS5634057B2 JP S5634057 B2 JPS5634057 B2 JP S5634057B2 JP 3001275 A JP3001275 A JP 3001275A JP 3001275 A JP3001275 A JP 3001275A JP S5634057 B2 JPS5634057 B2 JP S5634057B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3001275A JPS51104884A (ja) | 1975-03-13 | 1975-03-13 | Ketsukankensasochi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3001275A JPS51104884A (ja) | 1975-03-13 | 1975-03-13 | Ketsukankensasochi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51104884A JPS51104884A (ja) | 1976-09-17 |
| JPS5634057B2 true JPS5634057B2 (ja) | 1981-08-07 |
Family
ID=12291943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3001275A Granted JPS51104884A (ja) | 1975-03-13 | 1975-03-13 | Ketsukankensasochi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51104884A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59157544A (ja) * | 1983-02-28 | 1984-09-06 | Nok Corp | 表面欠陥検査方法 |
| JPS63171346A (ja) * | 1987-10-05 | 1988-07-15 | Nikon Corp | 欠陥検査装置 |
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1975
- 1975-03-13 JP JP3001275A patent/JPS51104884A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51104884A (ja) | 1976-09-17 |