JPS5633873B2 - - Google Patents
Info
- Publication number
- JPS5633873B2 JPS5633873B2 JP15193676A JP15193676A JPS5633873B2 JP S5633873 B2 JPS5633873 B2 JP S5633873B2 JP 15193676 A JP15193676 A JP 15193676A JP 15193676 A JP15193676 A JP 15193676A JP S5633873 B2 JPS5633873 B2 JP S5633873B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15193676A JPS5376781A (en) | 1976-12-20 | 1976-12-20 | Production of piezoelectric substarate for elastic surface waves |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15193676A JPS5376781A (en) | 1976-12-20 | 1976-12-20 | Production of piezoelectric substarate for elastic surface waves |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5376781A JPS5376781A (en) | 1978-07-07 |
JPS5633873B2 true JPS5633873B2 (it) | 1981-08-06 |
Family
ID=15529430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15193676A Granted JPS5376781A (en) | 1976-12-20 | 1976-12-20 | Production of piezoelectric substarate for elastic surface waves |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5376781A (it) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2792464B2 (ja) * | 1995-05-25 | 1998-09-03 | 住友電気工業株式会社 | マイクロデバイス基板およびマイクロデバイス基板の製造方法 |
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1976
- 1976-12-20 JP JP15193676A patent/JPS5376781A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5376781A (en) | 1978-07-07 |