JPS5633872B2 - - Google Patents

Info

Publication number
JPS5633872B2
JPS5633872B2 JP12811076A JP12811076A JPS5633872B2 JP S5633872 B2 JPS5633872 B2 JP S5633872B2 JP 12811076 A JP12811076 A JP 12811076A JP 12811076 A JP12811076 A JP 12811076A JP S5633872 B2 JPS5633872 B2 JP S5633872B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12811076A
Other languages
Japanese (ja)
Other versions
JPS5353288A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12811076A priority Critical patent/JPS5353288A/ja
Publication of JPS5353288A publication Critical patent/JPS5353288A/ja
Publication of JPS5633872B2 publication Critical patent/JPS5633872B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP12811076A 1976-10-25 1976-10-25 Piezoelectric substrate Granted JPS5353288A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12811076A JPS5353288A (en) 1976-10-25 1976-10-25 Piezoelectric substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12811076A JPS5353288A (en) 1976-10-25 1976-10-25 Piezoelectric substrate

Publications (2)

Publication Number Publication Date
JPS5353288A JPS5353288A (en) 1978-05-15
JPS5633872B2 true JPS5633872B2 (ro) 1981-08-06

Family

ID=14976623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12811076A Granted JPS5353288A (en) 1976-10-25 1976-10-25 Piezoelectric substrate

Country Status (1)

Country Link
JP (1) JPS5353288A (ro)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003017983A (ja) * 2001-06-28 2003-01-17 Kyocera Corp 弾性波装置用ウエハ及びそれを用いた弾性波装置
JP2010178198A (ja) * 2009-01-30 2010-08-12 Epson Toyocom Corp 弾性表面波素子および圧電デバイス

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411693A (en) * 1977-06-28 1979-01-27 Toshiba Corp Processig method for elastic surface wave substrate
WO2024189829A1 (ja) * 2023-03-15 2024-09-19 ファナック株式会社 ミラー、レーザ加工装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057360A (ro) * 1973-09-18 1975-05-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057360A (ro) * 1973-09-18 1975-05-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003017983A (ja) * 2001-06-28 2003-01-17 Kyocera Corp 弾性波装置用ウエハ及びそれを用いた弾性波装置
JP2010178198A (ja) * 2009-01-30 2010-08-12 Epson Toyocom Corp 弾性表面波素子および圧電デバイス

Also Published As

Publication number Publication date
JPS5353288A (en) 1978-05-15

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