JPS5633846A - Detecting method for semiconductor substrate - Google Patents

Detecting method for semiconductor substrate

Info

Publication number
JPS5633846A
JPS5633846A JP10988279A JP10988279A JPS5633846A JP S5633846 A JPS5633846 A JP S5633846A JP 10988279 A JP10988279 A JP 10988279A JP 10988279 A JP10988279 A JP 10988279A JP S5633846 A JPS5633846 A JP S5633846A
Authority
JP
Japan
Prior art keywords
electrodes
substrate
capacity
semiconductor substrate
terminals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10988279A
Other languages
Japanese (ja)
Inventor
Nobuo Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10988279A priority Critical patent/JPS5633846A/en
Publication of JPS5633846A publication Critical patent/JPS5633846A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

PURPOSE:To permit the detection of the presence of the substrate with stability and without contact by utilizing high dielectric constant having the substrare wherein a change in electrostatic capacity across electrodes is detected. CONSTITUTION:An AC signal generated from a signal source 13 is applied across electrodes 9, 10 after being induced at the secondary side through a transformer 14. The absence of a substrate 1'' across the electrodes 9, 10 causes little flow of induced alternating current due to a small capacity across the electrodes 9, 10 and the voltage generated across terminals 17, 18 is small. The presence of the substrate 1'' across the electrodes 9, 10 after transportation causes a high capacity across the electrodes 9, 10 due to high dielectric constant of the substrate 1'' and the flow of alternating current will follow to raise the voltage across the terminals 17, 18.
JP10988279A 1979-08-29 1979-08-29 Detecting method for semiconductor substrate Pending JPS5633846A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10988279A JPS5633846A (en) 1979-08-29 1979-08-29 Detecting method for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10988279A JPS5633846A (en) 1979-08-29 1979-08-29 Detecting method for semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5633846A true JPS5633846A (en) 1981-04-04

Family

ID=14521546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10988279A Pending JPS5633846A (en) 1979-08-29 1979-08-29 Detecting method for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5633846A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0272544U (en) * 1988-11-18 1990-06-01

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233828U (en) * 1975-08-31 1977-03-10
JPS5279934A (en) * 1975-12-26 1977-07-05 Fuji Xerox Co Ltd Contactless paper detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233828U (en) * 1975-08-31 1977-03-10
JPS5279934A (en) * 1975-12-26 1977-07-05 Fuji Xerox Co Ltd Contactless paper detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0272544U (en) * 1988-11-18 1990-06-01

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