JPS563365A - Flow control valve testing apparatus - Google Patents

Flow control valve testing apparatus

Info

Publication number
JPS563365A
JPS563365A JP7702179A JP7702179A JPS563365A JP S563365 A JPS563365 A JP S563365A JP 7702179 A JP7702179 A JP 7702179A JP 7702179 A JP7702179 A JP 7702179A JP S563365 A JPS563365 A JP S563365A
Authority
JP
Japan
Prior art keywords
valve
opening
section
control
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7702179A
Other languages
English (en)
Inventor
Hide Saito
Junzo Inamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Electric Manufacturing Co Ltd
Original Assignee
Meidensha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Electric Manufacturing Co Ltd filed Critical Meidensha Electric Manufacturing Co Ltd
Priority to JP7702179A priority Critical patent/JPS563365A/ja
Publication of JPS563365A publication Critical patent/JPS563365A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing And Monitoring For Control Systems (AREA)
  • Magnetically Actuated Valves (AREA)
JP7702179A 1979-06-18 1979-06-18 Flow control valve testing apparatus Pending JPS563365A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7702179A JPS563365A (en) 1979-06-18 1979-06-18 Flow control valve testing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7702179A JPS563365A (en) 1979-06-18 1979-06-18 Flow control valve testing apparatus

Publications (1)

Publication Number Publication Date
JPS563365A true JPS563365A (en) 1981-01-14

Family

ID=13622093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7702179A Pending JPS563365A (en) 1979-06-18 1979-06-18 Flow control valve testing apparatus

Country Status (1)

Country Link
JP (1) JPS563365A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7114404B2 (en) * 2001-08-30 2006-10-03 Micron Technology, Inc. System and method for detecting flow in a mass flow controller
CN102644787A (zh) * 2011-02-15 2012-08-22 株式会社堀场Stec 流体控制装置和压力控制装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7114404B2 (en) * 2001-08-30 2006-10-03 Micron Technology, Inc. System and method for detecting flow in a mass flow controller
US7255128B2 (en) 2001-08-30 2007-08-14 Micron Technology, Inc. System and method for detecting flow in a mass flow controller
CN102644787A (zh) * 2011-02-15 2012-08-22 株式会社堀场Stec 流体控制装置和压力控制装置

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