JPS5633654Y2 - - Google Patents
Info
- Publication number
- JPS5633654Y2 JPS5633654Y2 JP12963572U JP12963572U JPS5633654Y2 JP S5633654 Y2 JPS5633654 Y2 JP S5633654Y2 JP 12963572 U JP12963572 U JP 12963572U JP 12963572 U JP12963572 U JP 12963572U JP S5633654 Y2 JPS5633654 Y2 JP S5633654Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12963572U JPS5633654Y2 (en:Method) | 1972-11-09 | 1972-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12963572U JPS5633654Y2 (en:Method) | 1972-11-09 | 1972-11-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49111482U JPS49111482U (en:Method) | 1974-09-24 |
| JPS5633654Y2 true JPS5633654Y2 (en:Method) | 1981-08-10 |
Family
ID=28387681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12963572U Expired JPS5633654Y2 (en:Method) | 1972-11-09 | 1972-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5633654Y2 (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120331A (ja) * | 1984-07-09 | 1986-01-29 | Nec Corp | レジストベ−ク装置 |
| JP2649156B2 (ja) * | 1987-02-13 | 1997-09-03 | 東京エレクトロン 株式会社 | レジスト塗布装置と方法 |
| JP2800008B2 (ja) * | 1988-06-27 | 1998-09-21 | 東京エレクトロン 株式会社 | 回転処理装置及び回転処理方法 |
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1972
- 1972-11-09 JP JP12963572U patent/JPS5633654Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49111482U (en:Method) | 1974-09-24 |