JPS49111482U - - Google Patents
Info
- Publication number
- JPS49111482U JPS49111482U JP12963572U JP12963572U JPS49111482U JP S49111482 U JPS49111482 U JP S49111482U JP 12963572 U JP12963572 U JP 12963572U JP 12963572 U JP12963572 U JP 12963572U JP S49111482 U JPS49111482 U JP S49111482U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12963572U JPS5633654Y2 (en:Method) | 1972-11-09 | 1972-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12963572U JPS5633654Y2 (en:Method) | 1972-11-09 | 1972-11-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49111482U true JPS49111482U (en:Method) | 1974-09-24 |
| JPS5633654Y2 JPS5633654Y2 (en:Method) | 1981-08-10 |
Family
ID=28387681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12963572U Expired JPS5633654Y2 (en:Method) | 1972-11-09 | 1972-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5633654Y2 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120331A (ja) * | 1984-07-09 | 1986-01-29 | Nec Corp | レジストベ−ク装置 |
| JPS63198330A (ja) * | 1987-02-13 | 1988-08-17 | Tokyo Electron Ltd | レジスト塗布方法およびその装置 |
| JPH029476A (ja) * | 1988-06-27 | 1990-01-12 | Teru Kyushu Kk | スピンコーティング装置 |
-
1972
- 1972-11-09 JP JP12963572U patent/JPS5633654Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120331A (ja) * | 1984-07-09 | 1986-01-29 | Nec Corp | レジストベ−ク装置 |
| JPS63198330A (ja) * | 1987-02-13 | 1988-08-17 | Tokyo Electron Ltd | レジスト塗布方法およびその装置 |
| JPH029476A (ja) * | 1988-06-27 | 1990-01-12 | Teru Kyushu Kk | スピンコーティング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5633654Y2 (en:Method) | 1981-08-10 |