JPS5633210U - - Google Patents

Info

Publication number
JPS5633210U
JPS5633210U JP11568979U JP11568979U JPS5633210U JP S5633210 U JPS5633210 U JP S5633210U JP 11568979 U JP11568979 U JP 11568979U JP 11568979 U JP11568979 U JP 11568979U JP S5633210 U JPS5633210 U JP S5633210U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11568979U
Other languages
Japanese (ja)
Other versions
JPS579287Y2 (un
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11568979U priority Critical patent/JPS579287Y2/ja
Publication of JPS5633210U publication Critical patent/JPS5633210U/ja
Application granted granted Critical
Publication of JPS579287Y2 publication Critical patent/JPS579287Y2/ja
Expired legal-status Critical Current

Links

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  • Framework For Endless Conveyors (AREA)
JP11568979U 1979-08-24 1979-08-24 Expired JPS579287Y2 (un)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11568979U JPS579287Y2 (un) 1979-08-24 1979-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11568979U JPS579287Y2 (un) 1979-08-24 1979-08-24

Publications (2)

Publication Number Publication Date
JPS5633210U true JPS5633210U (un) 1981-04-01
JPS579287Y2 JPS579287Y2 (un) 1982-02-23

Family

ID=29347922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11568979U Expired JPS579287Y2 (un) 1979-08-24 1979-08-24

Country Status (1)

Country Link
JP (1) JPS579287Y2 (un)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188709U (un) * 1981-05-28 1982-11-30
JPS61207143U (un) * 1985-06-18 1986-12-27
JPS6212509A (ja) * 1985-07-02 1987-01-21 Hitachi Electronics Eng Co Ltd ウェハ搬送装置
JPS62186640U (un) * 1986-05-16 1987-11-27

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188709U (un) * 1981-05-28 1982-11-30
JPS61207143U (un) * 1985-06-18 1986-12-27
JPS6212509A (ja) * 1985-07-02 1987-01-21 Hitachi Electronics Eng Co Ltd ウェハ搬送装置
JPS62186640U (un) * 1986-05-16 1987-11-27

Also Published As

Publication number Publication date
JPS579287Y2 (un) 1982-02-23

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