JPS5633210U - - Google Patents
Info
- Publication number
- JPS5633210U JPS5633210U JP11568979U JP11568979U JPS5633210U JP S5633210 U JPS5633210 U JP S5633210U JP 11568979 U JP11568979 U JP 11568979U JP 11568979 U JP11568979 U JP 11568979U JP S5633210 U JPS5633210 U JP S5633210U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Framework For Endless Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11568979U JPS579287Y2 (pt) | 1979-08-24 | 1979-08-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11568979U JPS579287Y2 (pt) | 1979-08-24 | 1979-08-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5633210U true JPS5633210U (pt) | 1981-04-01 |
JPS579287Y2 JPS579287Y2 (pt) | 1982-02-23 |
Family
ID=29347922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11568979U Expired JPS579287Y2 (pt) | 1979-08-24 | 1979-08-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS579287Y2 (pt) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57188709U (pt) * | 1981-05-28 | 1982-11-30 | ||
JPS61207143U (pt) * | 1985-06-18 | 1986-12-27 | ||
JPS6212509A (ja) * | 1985-07-02 | 1987-01-21 | Hitachi Electronics Eng Co Ltd | ウェハ搬送装置 |
JPS62186640U (pt) * | 1986-05-16 | 1987-11-27 |
-
1979
- 1979-08-24 JP JP11568979U patent/JPS579287Y2/ja not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57188709U (pt) * | 1981-05-28 | 1982-11-30 | ||
JPS61207143U (pt) * | 1985-06-18 | 1986-12-27 | ||
JPS6212509A (ja) * | 1985-07-02 | 1987-01-21 | Hitachi Electronics Eng Co Ltd | ウェハ搬送装置 |
JPS62186640U (pt) * | 1986-05-16 | 1987-11-27 |
Also Published As
Publication number | Publication date |
---|---|
JPS579287Y2 (pt) | 1982-02-23 |