JPS5633151Y2 - - Google Patents
Info
- Publication number
- JPS5633151Y2 JPS5633151Y2 JP3239377U JP3239377U JPS5633151Y2 JP S5633151 Y2 JPS5633151 Y2 JP S5633151Y2 JP 3239377 U JP3239377 U JP 3239377U JP 3239377 U JP3239377 U JP 3239377U JP S5633151 Y2 JPS5633151 Y2 JP S5633151Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3239377U JPS5633151Y2 (enExample) | 1977-03-17 | 1977-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3239377U JPS5633151Y2 (enExample) | 1977-03-17 | 1977-03-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53126564U JPS53126564U (enExample) | 1978-10-07 |
| JPS5633151Y2 true JPS5633151Y2 (enExample) | 1981-08-06 |
Family
ID=28885802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3239377U Expired JPS5633151Y2 (enExample) | 1977-03-17 | 1977-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5633151Y2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848935A (ja) * | 1981-09-18 | 1983-03-23 | Tokyo Ohka Kogyo Co Ltd | 自動プラズマ処理装置 |
| JP2834970B2 (ja) * | 1993-05-17 | 1998-12-14 | 大日本スクリーン製造株式会社 | 基板収納装置 |
-
1977
- 1977-03-17 JP JP3239377U patent/JPS5633151Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53126564U (enExample) | 1978-10-07 |