JPS5632507Y2 - - Google Patents
Info
- Publication number
- JPS5632507Y2 JPS5632507Y2 JP10210976U JP10210976U JPS5632507Y2 JP S5632507 Y2 JPS5632507 Y2 JP S5632507Y2 JP 10210976 U JP10210976 U JP 10210976U JP 10210976 U JP10210976 U JP 10210976U JP S5632507 Y2 JPS5632507 Y2 JP S5632507Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10210976U JPS5632507Y2 (en) | 1976-07-30 | 1976-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10210976U JPS5632507Y2 (en) | 1976-07-30 | 1976-07-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5319506U JPS5319506U (en) | 1978-02-20 |
| JPS5632507Y2 true JPS5632507Y2 (en) | 1981-08-03 |
Family
ID=28712315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10210976U Expired JPS5632507Y2 (en) | 1976-07-30 | 1976-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5632507Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4420909B2 (en) * | 1981-11-10 | 1997-06-10 | Silicon Technology | Wafering system |
| JPH01121648U (en) * | 1988-02-12 | 1989-08-17 |
-
1976
- 1976-07-30 JP JP10210976U patent/JPS5632507Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5319506U (en) | 1978-02-20 |