JPS5319506U - - Google Patents

Info

Publication number
JPS5319506U
JPS5319506U JP10210976U JP10210976U JPS5319506U JP S5319506 U JPS5319506 U JP S5319506U JP 10210976 U JP10210976 U JP 10210976U JP 10210976 U JP10210976 U JP 10210976U JP S5319506 U JPS5319506 U JP S5319506U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10210976U
Other languages
Japanese (ja)
Other versions
JPS5632507Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10210976U priority Critical patent/JPS5632507Y2/ja
Publication of JPS5319506U publication Critical patent/JPS5319506U/ja
Application granted granted Critical
Publication of JPS5632507Y2 publication Critical patent/JPS5632507Y2/ja
Expired legal-status Critical Current

Links

JP10210976U 1976-07-30 1976-07-30 Expired JPS5632507Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10210976U JPS5632507Y2 (en) 1976-07-30 1976-07-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10210976U JPS5632507Y2 (en) 1976-07-30 1976-07-30

Publications (2)

Publication Number Publication Date
JPS5319506U true JPS5319506U (en) 1978-02-20
JPS5632507Y2 JPS5632507Y2 (en) 1981-08-03

Family

ID=28712315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10210976U Expired JPS5632507Y2 (en) 1976-07-30 1976-07-30

Country Status (1)

Country Link
JP (1) JPS5632507Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01121648U (en) * 1988-02-12 1989-08-17
JPH06143250A (en) * 1981-11-10 1994-05-24 Silicon Technol Corp Production of wafer and device therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06143250A (en) * 1981-11-10 1994-05-24 Silicon Technol Corp Production of wafer and device therefor
JPH01121648U (en) * 1988-02-12 1989-08-17

Also Published As

Publication number Publication date
JPS5632507Y2 (en) 1981-08-03

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