JPS5631631B2 - - Google Patents

Info

Publication number
JPS5631631B2
JPS5631631B2 JP1634575A JP1634575A JPS5631631B2 JP S5631631 B2 JPS5631631 B2 JP S5631631B2 JP 1634575 A JP1634575 A JP 1634575A JP 1634575 A JP1634575 A JP 1634575A JP S5631631 B2 JPS5631631 B2 JP S5631631B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1634575A
Other languages
Japanese (ja)
Other versions
JPS5191735A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1634575A priority Critical patent/JPS5631631B2/ja
Publication of JPS5191735A publication Critical patent/JPS5191735A/ja
Publication of JPS5631631B2 publication Critical patent/JPS5631631B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Semiconductor Lasers (AREA)
JP1634575A 1975-02-10 1975-02-10 Expired JPS5631631B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1634575A JPS5631631B2 (enExample) 1975-02-10 1975-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1634575A JPS5631631B2 (enExample) 1975-02-10 1975-02-10

Publications (2)

Publication Number Publication Date
JPS5191735A JPS5191735A (enExample) 1976-08-11
JPS5631631B2 true JPS5631631B2 (enExample) 1981-07-22

Family

ID=11913786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1634575A Expired JPS5631631B2 (enExample) 1975-02-10 1975-02-10

Country Status (1)

Country Link
JP (1) JPS5631631B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018087959A1 (ja) 2016-11-14 2018-05-17 シンフォニアテクノロジー株式会社 圧電式アクチュエータ及び圧電式バルブ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018087959A1 (ja) 2016-11-14 2018-05-17 シンフォニアテクノロジー株式会社 圧電式アクチュエータ及び圧電式バルブ
US11009141B2 (en) 2016-11-14 2021-05-18 Sinfonia Technology Co., Ltd. Piezoelectric actuator and piezoelectric valve

Also Published As

Publication number Publication date
JPS5191735A (enExample) 1976-08-11

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