JPS5631540B2 - - Google Patents

Info

Publication number
JPS5631540B2
JPS5631540B2 JP1025173A JP1025173A JPS5631540B2 JP S5631540 B2 JPS5631540 B2 JP S5631540B2 JP 1025173 A JP1025173 A JP 1025173A JP 1025173 A JP1025173 A JP 1025173A JP S5631540 B2 JPS5631540 B2 JP S5631540B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1025173A
Other languages
Japanese (ja)
Other versions
JPS4999086A (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1025173A priority Critical patent/JPS5631540B2/ja
Publication of JPS4999086A publication Critical patent/JPS4999086A/ja
Publication of JPS5631540B2 publication Critical patent/JPS5631540B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1025173A 1973-01-26 1973-01-26 Expired JPS5631540B2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1025173A JPS5631540B2 (OSRAM) 1973-01-26 1973-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1025173A JPS5631540B2 (OSRAM) 1973-01-26 1973-01-26

Publications (2)

Publication Number Publication Date
JPS4999086A JPS4999086A (OSRAM) 1974-09-19
JPS5631540B2 true JPS5631540B2 (OSRAM) 1981-07-22

Family

ID=11745080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1025173A Expired JPS5631540B2 (OSRAM) 1973-01-26 1973-01-26

Country Status (1)

Country Link
JP (1) JPS5631540B2 (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138183A (en) * 1976-05-14 1977-11-18 Toshiba Corp Inspecting apparatus for flaw
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS61180128A (ja) * 1986-01-10 1986-08-12 Hitachi Ltd 物体表面検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4727988U (OSRAM) * 1971-04-19 1972-11-29
JPS4727987U (OSRAM) * 1971-04-19 1972-11-29

Also Published As

Publication number Publication date
JPS4999086A (OSRAM) 1974-09-19

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