JPS5631268B2 - - Google Patents
Info
- Publication number
- JPS5631268B2 JPS5631268B2 JP6580676A JP6580676A JPS5631268B2 JP S5631268 B2 JPS5631268 B2 JP S5631268B2 JP 6580676 A JP6580676 A JP 6580676A JP 6580676 A JP6580676 A JP 6580676A JP S5631268 B2 JPS5631268 B2 JP S5631268B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- ing And Chemical Polishing (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6580676A JPS52148305A (en) | 1976-06-04 | 1976-06-04 | Etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6580676A JPS52148305A (en) | 1976-06-04 | 1976-06-04 | Etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52148305A JPS52148305A (en) | 1977-12-09 |
| JPS5631268B2 true JPS5631268B2 (de) | 1981-07-20 |
Family
ID=13297627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6580676A Granted JPS52148305A (en) | 1976-06-04 | 1976-06-04 | Etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52148305A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2758170B2 (ja) * | 1988-06-01 | 1998-05-28 | 光洋精工株式会社 | 軸体に動圧発生用の溝を形成する方法 |
| KR20100124268A (ko) * | 2008-02-06 | 2010-11-26 | 나노 테라 인코포레이티드 | 표면에 미크론 크기의 특징형상을 형성하기 위한 제거가능 뒷댐재를 가지는 스텐실 및 그의 제조 및 사용 방법 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4893337A (de) * | 1972-03-11 | 1973-12-03 | ||
| JPS4910129A (de) * | 1972-05-29 | 1974-01-29 |
-
1976
- 1976-06-04 JP JP6580676A patent/JPS52148305A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4893337A (de) * | 1972-03-11 | 1973-12-03 | ||
| JPS4910129A (de) * | 1972-05-29 | 1974-01-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52148305A (en) | 1977-12-09 |