JPS5630699B2 - - Google Patents

Info

Publication number
JPS5630699B2
JPS5630699B2 JP10696372A JP10696372A JPS5630699B2 JP S5630699 B2 JPS5630699 B2 JP S5630699B2 JP 10696372 A JP10696372 A JP 10696372A JP 10696372 A JP10696372 A JP 10696372A JP S5630699 B2 JPS5630699 B2 JP S5630699B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10696372A
Other languages
Japanese (ja)
Other versions
JPS4965783A (esLanguage
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10696372A priority Critical patent/JPS5630699B2/ja
Publication of JPS4965783A publication Critical patent/JPS4965783A/ja
Publication of JPS5630699B2 publication Critical patent/JPS5630699B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP10696372A 1972-10-25 1972-10-25 Expired JPS5630699B2 (esLanguage)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10696372A JPS5630699B2 (esLanguage) 1972-10-25 1972-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10696372A JPS5630699B2 (esLanguage) 1972-10-25 1972-10-25

Publications (2)

Publication Number Publication Date
JPS4965783A JPS4965783A (esLanguage) 1974-06-26
JPS5630699B2 true JPS5630699B2 (esLanguage) 1981-07-16

Family

ID=14446963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10696372A Expired JPS5630699B2 (esLanguage) 1972-10-25 1972-10-25

Country Status (1)

Country Link
JP (1) JPS5630699B2 (esLanguage)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49122979A (esLanguage) * 1973-03-27 1974-11-25
JPS5260073A (en) * 1975-11-12 1977-05-18 Mitsubishi Electric Corp Production of semiconductor device
JPS5539650A (en) * 1978-09-12 1980-03-19 Nec Corp Manufacture of semiconductor device
JPS5638823A (en) * 1979-08-06 1981-04-14 Toray Ind Inc Formation of polyimide pattern

Also Published As

Publication number Publication date
JPS4965783A (esLanguage) 1974-06-26

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