JPS5630130Y2 - - Google Patents
Info
- Publication number
- JPS5630130Y2 JPS5630130Y2 JP1976055790U JP5579076U JPS5630130Y2 JP S5630130 Y2 JPS5630130 Y2 JP S5630130Y2 JP 1976055790 U JP1976055790 U JP 1976055790U JP 5579076 U JP5579076 U JP 5579076U JP S5630130 Y2 JPS5630130 Y2 JP S5630130Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976055790U JPS5630130Y2 (cs) | 1976-04-30 | 1976-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976055790U JPS5630130Y2 (cs) | 1976-04-30 | 1976-04-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52146963U JPS52146963U (cs) | 1977-11-08 |
| JPS5630130Y2 true JPS5630130Y2 (cs) | 1981-07-17 |
Family
ID=28514771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976055790U Expired JPS5630130Y2 (cs) | 1976-04-30 | 1976-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5630130Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240347311A1 (en) * | 2021-07-22 | 2024-10-17 | Asml Netherlands B.V. | System and apparatus for stabilizing electron sources in charged particle systems |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5046477A (cs) * | 1973-08-31 | 1975-04-25 |
-
1976
- 1976-04-30 JP JP1976055790U patent/JPS5630130Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52146963U (cs) | 1977-11-08 |