JPS52146963U - - Google Patents

Info

Publication number
JPS52146963U
JPS52146963U JP5579076U JP5579076U JPS52146963U JP S52146963 U JPS52146963 U JP S52146963U JP 5579076 U JP5579076 U JP 5579076U JP 5579076 U JP5579076 U JP 5579076U JP S52146963 U JPS52146963 U JP S52146963U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5579076U
Other languages
Japanese (ja)
Other versions
JPS5630130Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976055790U priority Critical patent/JPS5630130Y2/ja
Publication of JPS52146963U publication Critical patent/JPS52146963U/ja
Application granted granted Critical
Publication of JPS5630130Y2 publication Critical patent/JPS5630130Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1976055790U 1976-04-30 1976-04-30 Expired JPS5630130Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976055790U JPS5630130Y2 (cs) 1976-04-30 1976-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976055790U JPS5630130Y2 (cs) 1976-04-30 1976-04-30

Publications (2)

Publication Number Publication Date
JPS52146963U true JPS52146963U (cs) 1977-11-08
JPS5630130Y2 JPS5630130Y2 (cs) 1981-07-17

Family

ID=28514771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976055790U Expired JPS5630130Y2 (cs) 1976-04-30 1976-04-30

Country Status (1)

Country Link
JP (1) JPS5630130Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023001480A1 (en) * 2021-07-22 2023-01-26 Asml Netherlands B.V. System and apparatus for stabilizing electron sources in charged particle systems

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5046477A (cs) * 1973-08-31 1975-04-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5046477A (cs) * 1973-08-31 1975-04-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023001480A1 (en) * 2021-07-22 2023-01-26 Asml Netherlands B.V. System and apparatus for stabilizing electron sources in charged particle systems

Also Published As

Publication number Publication date
JPS5630130Y2 (cs) 1981-07-17

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