JPS5628630B2 - - Google Patents

Info

Publication number
JPS5628630B2
JPS5628630B2 JP6069973A JP6069973A JPS5628630B2 JP S5628630 B2 JPS5628630 B2 JP S5628630B2 JP 6069973 A JP6069973 A JP 6069973A JP 6069973 A JP6069973 A JP 6069973A JP S5628630 B2 JPS5628630 B2 JP S5628630B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6069973A
Other languages
Japanese (ja)
Other versions
JPS509198A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6069973A priority Critical patent/JPS5628630B2/ja
Publication of JPS509198A publication Critical patent/JPS509198A/ja
Publication of JPS5628630B2 publication Critical patent/JPS5628630B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP6069973A 1973-05-30 1973-05-30 Expired JPS5628630B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6069973A JPS5628630B2 (enrdf_load_stackoverflow) 1973-05-30 1973-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6069973A JPS5628630B2 (enrdf_load_stackoverflow) 1973-05-30 1973-05-30

Publications (2)

Publication Number Publication Date
JPS509198A JPS509198A (enrdf_load_stackoverflow) 1975-01-30
JPS5628630B2 true JPS5628630B2 (enrdf_load_stackoverflow) 1981-07-03

Family

ID=13149790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6069973A Expired JPS5628630B2 (enrdf_load_stackoverflow) 1973-05-30 1973-05-30

Country Status (1)

Country Link
JP (1) JPS5628630B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003025080A (ja) * 2000-09-13 2003-01-28 Hamamatsu Photonics Kk レーザ加工方法
US9711405B2 (en) 2002-03-12 2017-07-18 Hamamatsu Photonics K.K. Substrate dividing method
US9837315B2 (en) 2000-09-13 2017-12-05 Hamamatsu Photonics K.K. Laser processing method and laser processing apparatus

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56106646A (en) * 1980-01-31 1981-08-25 Tokyo Shibaura Electric Co Laser knife for operation
JPS59193783A (ja) * 1983-04-18 1984-11-02 Mitsubishi Electric Corp パイプ切断装置
JPS60177987A (ja) * 1984-02-24 1985-09-11 Agency Of Ind Science & Technol レ−ザ加工装置
JPS6126878U (ja) * 1984-07-24 1986-02-18 金剛株式会社 組立式収容室

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003025080A (ja) * 2000-09-13 2003-01-28 Hamamatsu Photonics Kk レーザ加工方法
US9837315B2 (en) 2000-09-13 2017-12-05 Hamamatsu Photonics K.K. Laser processing method and laser processing apparatus
US9711405B2 (en) 2002-03-12 2017-07-18 Hamamatsu Photonics K.K. Substrate dividing method
US10068801B2 (en) 2002-03-12 2018-09-04 Hamamatsu Photonics K.K. Substrate dividing method

Also Published As

Publication number Publication date
JPS509198A (enrdf_load_stackoverflow) 1975-01-30

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