JPS509198A - - Google Patents
Info
- Publication number
- JPS509198A JPS509198A JP48060699A JP6069973A JPS509198A JP S509198 A JPS509198 A JP S509198A JP 48060699 A JP48060699 A JP 48060699A JP 6069973 A JP6069973 A JP 6069973A JP S509198 A JPS509198 A JP S509198A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Laser Beam Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6069973A JPS5628630B2 (enrdf_load_stackoverflow) | 1973-05-30 | 1973-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6069973A JPS5628630B2 (enrdf_load_stackoverflow) | 1973-05-30 | 1973-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS509198A true JPS509198A (enrdf_load_stackoverflow) | 1975-01-30 |
| JPS5628630B2 JPS5628630B2 (enrdf_load_stackoverflow) | 1981-07-03 |
Family
ID=13149790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6069973A Expired JPS5628630B2 (enrdf_load_stackoverflow) | 1973-05-30 | 1973-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5628630B2 (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56106646A (en) * | 1980-01-31 | 1981-08-25 | Tokyo Shibaura Electric Co | Laser knife for operation |
| JPS59193783A (ja) * | 1983-04-18 | 1984-11-02 | Mitsubishi Electric Corp | パイプ切断装置 |
| JPS60177987A (ja) * | 1984-02-24 | 1985-09-11 | Agency Of Ind Science & Technol | レ−ザ加工装置 |
| JPS6126878U (ja) * | 1984-07-24 | 1986-02-18 | 金剛株式会社 | 組立式収容室 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4663952B2 (ja) * | 2000-09-13 | 2011-04-06 | 浜松ホトニクス株式会社 | レーザ加工装置及びレーザ加工方法 |
| JP4659300B2 (ja) | 2000-09-13 | 2011-03-30 | 浜松ホトニクス株式会社 | レーザ加工方法及び半導体チップの製造方法 |
| ES2285634T3 (es) | 2002-03-12 | 2007-11-16 | Hamamatsu Photonics K. K. | Metodo para dividir un siustrato. |
-
1973
- 1973-05-30 JP JP6069973A patent/JPS5628630B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56106646A (en) * | 1980-01-31 | 1981-08-25 | Tokyo Shibaura Electric Co | Laser knife for operation |
| JPS59193783A (ja) * | 1983-04-18 | 1984-11-02 | Mitsubishi Electric Corp | パイプ切断装置 |
| JPS60177987A (ja) * | 1984-02-24 | 1985-09-11 | Agency Of Ind Science & Technol | レ−ザ加工装置 |
| JPS6126878U (ja) * | 1984-07-24 | 1986-02-18 | 金剛株式会社 | 組立式収容室 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5628630B2 (enrdf_load_stackoverflow) | 1981-07-03 |