JPS5628244B2 - - Google Patents
Info
- Publication number
- JPS5628244B2 JPS5628244B2 JP10118673A JP10118673A JPS5628244B2 JP S5628244 B2 JPS5628244 B2 JP S5628244B2 JP 10118673 A JP10118673 A JP 10118673A JP 10118673 A JP10118673 A JP 10118673A JP S5628244 B2 JPS5628244 B2 JP S5628244B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Focusing (AREA)
- Lens Barrels (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10118673A JPS5628244B2 (OSRAM) | 1973-09-10 | 1973-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10118673A JPS5628244B2 (OSRAM) | 1973-09-10 | 1973-09-10 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5544282A Division JPS57201208A (en) | 1982-04-05 | 1982-04-05 | Autofocusing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5054344A JPS5054344A (OSRAM) | 1975-05-14 |
| JPS5628244B2 true JPS5628244B2 (OSRAM) | 1981-06-30 |
Family
ID=14293936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10118673A Expired JPS5628244B2 (OSRAM) | 1973-09-10 | 1973-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5628244B2 (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6027138A (ja) * | 1983-07-25 | 1985-02-12 | Nec Kyushu Ltd | 半導体装置用外観検査装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4412421Y1 (OSRAM) * | 1966-03-04 | 1969-05-23 | ||
| JPS444858Y1 (OSRAM) * | 1968-09-13 | 1969-02-21 |
-
1973
- 1973-09-10 JP JP10118673A patent/JPS5628244B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5054344A (OSRAM) | 1975-05-14 |