JPS5625017B2 - - Google Patents
Info
- Publication number
- JPS5625017B2 JPS5625017B2 JP14976476A JP14976476A JPS5625017B2 JP S5625017 B2 JPS5625017 B2 JP S5625017B2 JP 14976476 A JP14976476 A JP 14976476A JP 14976476 A JP14976476 A JP 14976476A JP S5625017 B2 JPS5625017 B2 JP S5625017B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14976476A JPS5374379A (en) | 1976-12-15 | 1976-12-15 | Correction filter for illuminance distribution |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14976476A JPS5374379A (en) | 1976-12-15 | 1976-12-15 | Correction filter for illuminance distribution |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5374379A JPS5374379A (en) | 1978-07-01 |
JPS5625017B2 true JPS5625017B2 (US20030199744A1-20031023-C00003.png) | 1981-06-10 |
Family
ID=15482218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14976476A Granted JPS5374379A (en) | 1976-12-15 | 1976-12-15 | Correction filter for illuminance distribution |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5374379A (US20030199744A1-20031023-C00003.png) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0319087B2 (US20030199744A1-20031023-C00003.png) * | 1982-08-23 | 1991-03-14 | Nissan Shatai Co | |
JPH0762503B2 (ja) * | 1987-04-14 | 1995-07-05 | ジーメンス アクチエンゲゼルシヤフト | ダイナミツクエネルギ・アブソーバ |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6325640A (ja) * | 1986-07-18 | 1988-02-03 | Oak Seisakusho:Kk | 平行光投射光学系 |
NL2016732A (en) * | 2015-06-02 | 2016-12-12 | Asml Netherlands Bv | A filter, method of formation thereof, and an image sensor |
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1976
- 1976-12-15 JP JP14976476A patent/JPS5374379A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0319087B2 (US20030199744A1-20031023-C00003.png) * | 1982-08-23 | 1991-03-14 | Nissan Shatai Co | |
JPH0762503B2 (ja) * | 1987-04-14 | 1995-07-05 | ジーメンス アクチエンゲゼルシヤフト | ダイナミツクエネルギ・アブソーバ |
Also Published As
Publication number | Publication date |
---|---|
JPS5374379A (en) | 1978-07-01 |