JPS5623317B2 - - Google Patents
Info
- Publication number
- JPS5623317B2 JPS5623317B2 JP1624175A JP1624175A JPS5623317B2 JP S5623317 B2 JPS5623317 B2 JP S5623317B2 JP 1624175 A JP1624175 A JP 1624175A JP 1624175 A JP1624175 A JP 1624175A JP S5623317 B2 JPS5623317 B2 JP S5623317B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1624175A JPS5623317B2 (fr) | 1975-02-10 | 1975-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1624175A JPS5623317B2 (fr) | 1975-02-10 | 1975-02-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5191682A JPS5191682A (fr) | 1976-08-11 |
| JPS5623317B2 true JPS5623317B2 (fr) | 1981-05-30 |
Family
ID=11911047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1624175A Expired JPS5623317B2 (fr) | 1975-02-10 | 1975-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5623317B2 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59127876A (ja) * | 1983-01-13 | 1984-07-23 | Nec Corp | ダイアフラム形半導体圧力センサ |
-
1975
- 1975-02-10 JP JP1624175A patent/JPS5623317B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5191682A (fr) | 1976-08-11 |