JPS5623144B2 - - Google Patents
Info
- Publication number
- JPS5623144B2 JPS5623144B2 JP88374A JP88374A JPS5623144B2 JP S5623144 B2 JPS5623144 B2 JP S5623144B2 JP 88374 A JP88374 A JP 88374A JP 88374 A JP88374 A JP 88374A JP S5623144 B2 JPS5623144 B2 JP S5623144B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP88374A JPS5623144B2 (en) | 1973-12-24 | 1973-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP88374A JPS5623144B2 (en) | 1973-12-24 | 1973-12-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5095003A JPS5095003A (en) | 1975-07-29 |
| JPS5623144B2 true JPS5623144B2 (en) | 1981-05-29 |
Family
ID=11486057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP88374A Expired JPS5623144B2 (en) | 1973-12-24 | 1973-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5623144B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5744143A (en) * | 1980-08-29 | 1982-03-12 | Tokyo Ohka Kogyo Co Ltd | Composition and method for forming micropattern |
-
1973
- 1973-12-24 JP JP88374A patent/JPS5623144B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5095003A (en) | 1975-07-29 |