JPS5622948B2 - - Google Patents
Info
- Publication number
- JPS5622948B2 JPS5622948B2 JP1706377A JP1706377A JPS5622948B2 JP S5622948 B2 JPS5622948 B2 JP S5622948B2 JP 1706377 A JP1706377 A JP 1706377A JP 1706377 A JP1706377 A JP 1706377A JP S5622948 B2 JPS5622948 B2 JP S5622948B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H1/00—Details of emergency protective circuit arrangements
- H02H1/0007—Details of emergency protective circuit arrangements concerning the detecting means
- H02H1/0015—Using arc detectors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H3/00—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection
- H02H3/08—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess current
- H02H3/10—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess current additionally responsive to some other abnormal electrical conditions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/16—Heating by glow discharge
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
- H02H7/003—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electrostatic apparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Discharge Heating (AREA)
- Plasma Technology (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2606395A DE2606395C3 (de) | 1976-02-18 | 1976-02-18 | Verfahren und Vorrichtung zur Überwachung des elektrischen Verhaltens einer stromstarken Glimmentladung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5299935A JPS5299935A (en) | 1977-08-22 |
| JPS5622948B2 true JPS5622948B2 (US06256357-20010703-M00001.png) | 1981-05-28 |
Family
ID=5970147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1706377A Granted JPS5299935A (en) | 1976-02-18 | 1977-02-18 | Method of monitoring electric characteristics of large current density glow discharge and apparatus therefor |
Country Status (9)
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2620164C2 (de) * | 1976-05-07 | 1978-07-06 | Ionit Anstalt Bernhard Berghaus, Vaduz | Verfahren und Vorrichtung zur Überwachung von stromstarken Glimmentladungen |
| FR2442568A2 (fr) * | 1978-11-27 | 1980-06-20 | Bourboulon Henri | Circuit d'alimentation protecteur pour lampes a decharge |
| FR2497038A1 (fr) * | 1980-12-19 | 1982-06-25 | Frager Jean | Generateur de courant asservi en puissance, notamment pour processus de decharge dans une atmosphere rarefiee |
| BG41744A1 (en) * | 1984-11-26 | 1987-08-14 | Savov | Method for control of chimico= thermic processing of work- pieces with glowing dicharge in medium of processing gas and device for implementing this method |
| US4853046A (en) * | 1987-09-04 | 1989-08-01 | Surface Combustion, Inc. | Ion carburizing |
| US5127967A (en) * | 1987-09-04 | 1992-07-07 | Surface Combustion, Inc. | Ion carburizing |
| US5241152A (en) * | 1990-03-23 | 1993-08-31 | Anderson Glen L | Circuit for detecting and diverting an electrical arc in a glow discharge apparatus |
| DE4326100B4 (de) * | 1993-08-04 | 2006-03-23 | Unaxis Deutschland Holding Gmbh | Verfahren und Vorrichtung zum Beschichten von Substraten in einer Vakuumkammer, mit einer Einrichtung zur Erkennung und Unterdrückung von unerwünschten Lichtbögen |
| US7981257B2 (en) * | 2002-04-12 | 2011-07-19 | Schneider Electric USA, Inc. | Current-based method and apparatus for detecting and classifying arcs |
| US7988833B2 (en) * | 2002-04-12 | 2011-08-02 | Schneider Electric USA, Inc. | System and method for detecting non-cathode arcing in a plasma generation apparatus |
| CN101473403B (zh) | 2006-03-17 | 2012-02-08 | 施耐德自动化公司 | 用于检测和分类发弧的基于电流的方法和设备 |
| US20090308734A1 (en) * | 2008-06-17 | 2009-12-17 | Schneider Automation Inc. | Apparatus and Method for Wafer Level Arc Detection |
| US10431428B2 (en) | 2014-01-10 | 2019-10-01 | Reno Technologies, Inc. | System for providing variable capacitance |
| US9745660B2 (en) | 2014-05-02 | 2017-08-29 | Reno Technologies, Inc. | Method for controlling a plasma chamber |
| DE102014213744A1 (de) * | 2014-07-15 | 2016-01-21 | Primetals Technologies Germany Gmbh | Elektrischer Lichtbogenofen mit einer Sicherheitsvorrichtung und Verfahren zur Sicherung von Peripheriegeräten an elektrischen Lichtbogenöfen |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1275228B (de) * | 1966-11-08 | 1968-08-14 | Berghaus Elektrophysik Anst | Verfahren zur UEberwachung des elektrischen Verhaltens einer stromstarken Glimmentladung fuer metallurgische Verfahren und Einrichtung dazu |
| JPS4986926A (US06256357-20010703-M00001.png) * | 1972-12-25 | 1974-08-20 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3564528A (en) * | 1966-08-22 | 1971-02-16 | Ex Cell O Corp | Electronic control circuit |
| US3681662A (en) * | 1970-10-23 | 1972-08-01 | Berghaus Elektrophysik Anst | Method of monitoring the electrical behavior of a high-intensity glow discharge for metallurgical processes |
| US4034269A (en) * | 1975-12-12 | 1977-07-05 | General Electric Company | Protective relay circuits |
-
1976
- 1976-02-18 DE DE2606395A patent/DE2606395C3/de not_active Expired
-
1977
- 1977-01-25 CH CH86377A patent/CH611750A5/xx not_active IP Right Cessation
- 1977-02-10 FR FR7703789A patent/FR2342000A1/fr active Granted
- 1977-02-16 CA CA271,942A patent/CA1093435A/en not_active Expired
- 1977-02-16 BR BR7700947A patent/BR7700947A/pt unknown
- 1977-02-16 US US05/769,163 patent/US4193070A/en not_active Expired - Lifetime
- 1977-02-18 IT IT20418/77A patent/IT1077259B/it active
- 1977-02-18 JP JP1706377A patent/JPS5299935A/ja active Granted
- 1977-02-18 GB GB6842/77A patent/GB1575447A/en not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1275228B (de) * | 1966-11-08 | 1968-08-14 | Berghaus Elektrophysik Anst | Verfahren zur UEberwachung des elektrischen Verhaltens einer stromstarken Glimmentladung fuer metallurgische Verfahren und Einrichtung dazu |
| JPS4986926A (US06256357-20010703-M00001.png) * | 1972-12-25 | 1974-08-20 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2606395B2 (de) | 1978-05-18 |
| GB1575447A (en) | 1980-09-24 |
| DE2606395C3 (de) | 1979-01-18 |
| CA1093435A (en) | 1981-01-13 |
| CH611750A5 (US06256357-20010703-M00001.png) | 1979-06-15 |
| BR7700947A (pt) | 1977-10-18 |
| JPS5299935A (en) | 1977-08-22 |
| IT1077259B (it) | 1985-05-04 |
| FR2342000B1 (US06256357-20010703-M00001.png) | 1980-04-18 |
| DE2606395A1 (de) | 1977-08-25 |
| US4193070A (en) | 1980-03-11 |
| FR2342000A1 (fr) | 1977-09-16 |
