JPS5622138B2 - - Google Patents
Info
- Publication number
- JPS5622138B2 JPS5622138B2 JP9435572A JP9435572A JPS5622138B2 JP S5622138 B2 JPS5622138 B2 JP S5622138B2 JP 9435572 A JP9435572 A JP 9435572A JP 9435572 A JP9435572 A JP 9435572A JP S5622138 B2 JPS5622138 B2 JP S5622138B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
- H10W72/07141—Means for applying energy, e.g. ovens or lasers
Landscapes
- Wire Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9435572A JPS5622138B2 (oth) | 1972-09-20 | 1972-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9435572A JPS5622138B2 (oth) | 1972-09-20 | 1972-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4952580A JPS4952580A (oth) | 1974-05-22 |
| JPS5622138B2 true JPS5622138B2 (oth) | 1981-05-23 |
Family
ID=14107966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9435572A Expired JPS5622138B2 (oth) | 1972-09-20 | 1972-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5622138B2 (oth) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5759324A (en) * | 1980-09-26 | 1982-04-09 | Toshiba Corp | Device for exposure of electron beam |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313804B2 (oth) * | 1973-06-07 | 1978-05-12 |
-
1972
- 1972-09-20 JP JP9435572A patent/JPS5622138B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4952580A (oth) | 1974-05-22 |