JPS4952580A - - Google Patents

Info

Publication number
JPS4952580A
JPS4952580A JP47094355A JP9435572A JPS4952580A JP S4952580 A JPS4952580 A JP S4952580A JP 47094355 A JP47094355 A JP 47094355A JP 9435572 A JP9435572 A JP 9435572A JP S4952580 A JPS4952580 A JP S4952580A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47094355A
Other languages
Japanese (ja)
Other versions
JPS5622138B2 (oth
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9435572A priority Critical patent/JPS5622138B2/ja
Publication of JPS4952580A publication Critical patent/JPS4952580A/ja
Publication of JPS5622138B2 publication Critical patent/JPS5622138B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H10W72/07141—Means for applying energy, e.g. ovens or lasers

Landscapes

  • Wire Bonding (AREA)
JP9435572A 1972-09-20 1972-09-20 Expired JPS5622138B2 (oth)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9435572A JPS5622138B2 (oth) 1972-09-20 1972-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9435572A JPS5622138B2 (oth) 1972-09-20 1972-09-20

Publications (2)

Publication Number Publication Date
JPS4952580A true JPS4952580A (oth) 1974-05-22
JPS5622138B2 JPS5622138B2 (oth) 1981-05-23

Family

ID=14107966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9435572A Expired JPS5622138B2 (oth) 1972-09-20 1972-09-20

Country Status (1)

Country Link
JP (1) JPS5622138B2 (oth)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759324A (en) * 1980-09-26 1982-04-09 Toshiba Corp Device for exposure of electron beam

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5013918A (oth) * 1973-06-07 1975-02-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5013918A (oth) * 1973-06-07 1975-02-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759324A (en) * 1980-09-26 1982-04-09 Toshiba Corp Device for exposure of electron beam

Also Published As

Publication number Publication date
JPS5622138B2 (oth) 1981-05-23

Similar Documents

Publication Publication Date Title
JPS48103353A (oth)
JPS5622138B2 (oth)
JPS5625624B2 (oth)
JPS5617590B2 (oth)
AU476437B2 (oth)
JPS5342788Y2 (oth)
RO61275A2 (oth)
CH572213A5 (oth)
CH576733A5 (oth)
BG20209A1 (oth)
CH1074373A4 (oth)
CH1244373A4 (oth)
CH560269A5 (oth)
CH560387A5 (oth)
CH561001A5 (oth)
CH579966A5 (oth)
CH562847A5 (oth)
CH563616A5 (oth)
CH565743A5 (oth)
CH567672A5 (oth)
CH568538A5 (oth)
CH568600B5 (oth)
CH580369A5 (oth)
AU481228A (oth)
CH573559A5 (oth)