JPS5622039A - Sampling device for electron microscope, etc. - Google Patents

Sampling device for electron microscope, etc.

Info

Publication number
JPS5622039A
JPS5622039A JP9654879A JP9654879A JPS5622039A JP S5622039 A JPS5622039 A JP S5622039A JP 9654879 A JP9654879 A JP 9654879A JP 9654879 A JP9654879 A JP 9654879A JP S5622039 A JPS5622039 A JP S5622039A
Authority
JP
Japan
Prior art keywords
sample
exchange chamber
holder
heating
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9654879A
Other languages
Japanese (ja)
Other versions
JPS5923418B2 (en
Inventor
Koro Oi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP9654879A priority Critical patent/JPS5923418B2/en
Publication of JPS5622039A publication Critical patent/JPS5622039A/en
Publication of JPS5923418B2 publication Critical patent/JPS5923418B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To prevent drifting due to the difference in temperature between holder and stage and shorten time to the beginning of photographing by providing a heating means to heat a sample holder in such a way as to almost equalize its temperature with that of a sample stage in a sample exchange chamber. CONSTITUTION:In the border between the sample exchange chamber 12 leading to the sample cohamber 8 through the communication hole 13 and the sample chamber 8, an air lock valve 14 to isolate them from each other is provided, and in the exchange chamber 12, a lid through which the sample holder 11 is taken out to the open air and the a sample-exchanging bar for moving the holder 11 are provided. Also, at both ends of the heating coil 15 for heating the exchange chamber 12, the differential amplifier 17 connected to the heating power source 16 and serving to obtain the difference in detected signals from the temperature detecting elements 18a, 18b, e.g., thermister, etc., attached to each of a sample stage 9 and the exchange chamber 12 is provided, and by its output signal, a heating power source 16 is controlled. Thus, the drifting of the sample can be prevented and the time to the beginning of photographing can be greatly shortened.
JP9654879A 1979-07-28 1979-07-28 Sample equipment for electron microscopes, etc. Expired JPS5923418B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9654879A JPS5923418B2 (en) 1979-07-28 1979-07-28 Sample equipment for electron microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9654879A JPS5923418B2 (en) 1979-07-28 1979-07-28 Sample equipment for electron microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS5622039A true JPS5622039A (en) 1981-03-02
JPS5923418B2 JPS5923418B2 (en) 1984-06-01

Family

ID=14168136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9654879A Expired JPS5923418B2 (en) 1979-07-28 1979-07-28 Sample equipment for electron microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS5923418B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059457U (en) * 1983-09-30 1985-04-25 株式会社明石製作所 electron beam equipment
WO2015064691A1 (en) * 2013-11-01 2015-05-07 株式会社日立ハイテクノロジーズ Charged particle beam device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059457U (en) * 1983-09-30 1985-04-25 株式会社明石製作所 electron beam equipment
WO2015064691A1 (en) * 2013-11-01 2015-05-07 株式会社日立ハイテクノロジーズ Charged particle beam device
JP2015088417A (en) * 2013-11-01 2015-05-07 株式会社日立ハイテクノロジーズ Charged particle beam apparatus

Also Published As

Publication number Publication date
JPS5923418B2 (en) 1984-06-01

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