JPS5620690B2 - - Google Patents
Info
- Publication number
- JPS5620690B2 JPS5620690B2 JP3849972A JP3849972A JPS5620690B2 JP S5620690 B2 JPS5620690 B2 JP S5620690B2 JP 3849972 A JP3849972 A JP 3849972A JP 3849972 A JP3849972 A JP 3849972A JP S5620690 B2 JPS5620690 B2 JP S5620690B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3849972A JPS5620690B2 (https=) | 1972-04-17 | 1972-04-17 | |
| US304841A US3871764A (en) | 1972-04-05 | 1972-11-08 | Pattern generator apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3849972A JPS5620690B2 (https=) | 1972-04-17 | 1972-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS491177A JPS491177A (https=) | 1974-01-08 |
| JPS5620690B2 true JPS5620690B2 (https=) | 1981-05-15 |
Family
ID=12526938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3849972A Expired JPS5620690B2 (https=) | 1972-04-05 | 1972-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5620690B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5346367U (https=) * | 1976-09-25 | 1978-04-20 | ||
| AU3951678A (en) * | 1977-09-13 | 1980-03-13 | Heller, William C. Jr. | Fusion bonding non-elastomeric thermoplastic elements |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1529444A (fr) * | 1966-07-01 | 1968-06-14 | Telefunken Patent | Dispositif d'alignement précis de masques sur des éléments semi-conducteurs |
-
1972
- 1972-04-17 JP JP3849972A patent/JPS5620690B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS491177A (https=) | 1974-01-08 |