JPS5620690B2 - - Google Patents

Info

Publication number
JPS5620690B2
JPS5620690B2 JP3849972A JP3849972A JPS5620690B2 JP S5620690 B2 JPS5620690 B2 JP S5620690B2 JP 3849972 A JP3849972 A JP 3849972A JP 3849972 A JP3849972 A JP 3849972A JP S5620690 B2 JPS5620690 B2 JP S5620690B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3849972A
Other languages
Japanese (ja)
Other versions
JPS491177A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3849972A priority Critical patent/JPS5620690B2/ja
Priority to US304841A priority patent/US3871764A/en
Publication of JPS491177A publication Critical patent/JPS491177A/ja
Publication of JPS5620690B2 publication Critical patent/JPS5620690B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP3849972A 1972-04-05 1972-04-17 Expired JPS5620690B2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3849972A JPS5620690B2 (enrdf_load_stackoverflow) 1972-04-17 1972-04-17
US304841A US3871764A (en) 1972-04-05 1972-11-08 Pattern generator apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3849972A JPS5620690B2 (enrdf_load_stackoverflow) 1972-04-17 1972-04-17

Publications (2)

Publication Number Publication Date
JPS491177A JPS491177A (enrdf_load_stackoverflow) 1974-01-08
JPS5620690B2 true JPS5620690B2 (enrdf_load_stackoverflow) 1981-05-15

Family

ID=12526938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3849972A Expired JPS5620690B2 (enrdf_load_stackoverflow) 1972-04-05 1972-04-17

Country Status (1)

Country Link
JP (1) JPS5620690B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5346367U (enrdf_load_stackoverflow) * 1976-09-25 1978-04-20
AU3951678A (en) * 1977-09-13 1980-03-13 Heller, William C. Jr. Fusion bonding non-elastomeric thermoplastic elements

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1529444A (fr) * 1966-07-01 1968-06-14 Telefunken Patent Dispositif d'alignement précis de masques sur des éléments semi-conducteurs

Also Published As

Publication number Publication date
JPS491177A (enrdf_load_stackoverflow) 1974-01-08

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