JPS5620690B2 - - Google Patents

Info

Publication number
JPS5620690B2
JPS5620690B2 JP3849972A JP3849972A JPS5620690B2 JP S5620690 B2 JPS5620690 B2 JP S5620690B2 JP 3849972 A JP3849972 A JP 3849972A JP 3849972 A JP3849972 A JP 3849972A JP S5620690 B2 JPS5620690 B2 JP S5620690B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3849972A
Other languages
Japanese (ja)
Other versions
JPS491177A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3849972A priority Critical patent/JPS5620690B2/ja
Priority to US304841A priority patent/US3871764A/en
Publication of JPS491177A publication Critical patent/JPS491177A/ja
Publication of JPS5620690B2 publication Critical patent/JPS5620690B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP3849972A 1972-04-05 1972-04-17 Expired JPS5620690B2 (cs)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3849972A JPS5620690B2 (cs) 1972-04-17 1972-04-17
US304841A US3871764A (en) 1972-04-05 1972-11-08 Pattern generator apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3849972A JPS5620690B2 (cs) 1972-04-17 1972-04-17

Publications (2)

Publication Number Publication Date
JPS491177A JPS491177A (cs) 1974-01-08
JPS5620690B2 true JPS5620690B2 (cs) 1981-05-15

Family

ID=12526938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3849972A Expired JPS5620690B2 (cs) 1972-04-05 1972-04-17

Country Status (1)

Country Link
JP (1) JPS5620690B2 (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5346367U (cs) * 1976-09-25 1978-04-20
AU3951678A (en) * 1977-09-13 1980-03-13 Heller, William C. Jr. Fusion bonding non-elastomeric thermoplastic elements

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1529444A (fr) * 1966-07-01 1968-06-14 Telefunken Patent Dispositif d'alignement précis de masques sur des éléments semi-conducteurs

Also Published As

Publication number Publication date
JPS491177A (cs) 1974-01-08

Similar Documents

Publication Publication Date Title
JPS4887702A (cs)
JPS5441414B2 (cs)
JPS5548171Y2 (cs)
JPS5635033B2 (cs)
JPS5032647B2 (cs)
JPS4919A (cs)
JPS5620690B2 (cs)
JPS5637342Y2 (cs)
JPS4948700A (cs)
JPS5233632Y2 (cs)
JPS5335070Y2 (cs)
CS153161B1 (cs)
CS152733B1 (cs)
CS154035B1 (cs)
JPS4931089A (cs)
FR2170990A1 (cs)
CS154530B1 (cs)
CS154091B1 (cs)
CH599228A5 (cs)
CH584073A5 (cs)
NL7301003A (cs)
CH745973A4 (cs)
CH606404A5 (cs)
NL7313239A (cs)
CH595023A5 (cs)