JPS5619928B2 - - Google Patents
Info
- Publication number
- JPS5619928B2 JPS5619928B2 JP13695375A JP13695375A JPS5619928B2 JP S5619928 B2 JPS5619928 B2 JP S5619928B2 JP 13695375 A JP13695375 A JP 13695375A JP 13695375 A JP13695375 A JP 13695375A JP S5619928 B2 JPS5619928 B2 JP S5619928B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50136953A JPS5260989A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50136953A JPS5260989A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5260989A JPS5260989A (en) | 1977-05-19 |
| JPS5619928B2 true JPS5619928B2 (cs) | 1981-05-11 |
Family
ID=15187356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50136953A Granted JPS5260989A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5260989A (cs) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6217099A (ja) * | 1985-07-16 | 1987-01-26 | Kokusai Denshin Denwa Co Ltd <Kdd> | ビスマス含有酸化物単結晶の製造方法 |
| JPH068509B2 (ja) * | 1985-09-17 | 1994-02-02 | 勝 岡田 | 強誘電体薄膜の製造方法 |
| JPS6447851A (en) * | 1987-08-18 | 1989-02-22 | Canon Kk | Formation of thin bismuth-titanate film |
| KR100723399B1 (ko) | 2002-08-06 | 2007-05-30 | 삼성전자주식회사 | 비스무트 티타늄 실리콘 산화물, 비스무트 티타늄 실리콘산화물 박막 및 그 제조방법 |
-
1975
- 1975-11-13 JP JP50136953A patent/JPS5260989A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5260989A (en) | 1977-05-19 |