JPS5619740B2 - - Google Patents
Info
- Publication number
- JPS5619740B2 JPS5619740B2 JP6830176A JP6830176A JPS5619740B2 JP S5619740 B2 JPS5619740 B2 JP S5619740B2 JP 6830176 A JP6830176 A JP 6830176A JP 6830176 A JP6830176 A JP 6830176A JP S5619740 B2 JPS5619740 B2 JP S5619740B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6830176A JPS52150982A (en) | 1976-06-10 | 1976-06-10 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6830176A JPS52150982A (en) | 1976-06-10 | 1976-06-10 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52150982A JPS52150982A (en) | 1977-12-15 |
| JPS5619740B2 true JPS5619740B2 (cs) | 1981-05-09 |
Family
ID=13369816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6830176A Granted JPS52150982A (en) | 1976-06-10 | 1976-06-10 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52150982A (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4118250A (en) * | 1977-12-30 | 1978-10-03 | International Business Machines Corporation | Process for producing integrated circuit devices by ion implantation |
| US4201800A (en) * | 1978-04-28 | 1980-05-06 | International Business Machines Corp. | Hardened photoresist master image mask process |
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1976
- 1976-06-10 JP JP6830176A patent/JPS52150982A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52150982A (en) | 1977-12-15 |