JPS5619733B2 - - Google Patents
Info
- Publication number
- JPS5619733B2 JPS5619733B2 JP1488874A JP1488874A JPS5619733B2 JP S5619733 B2 JPS5619733 B2 JP S5619733B2 JP 1488874 A JP1488874 A JP 1488874A JP 1488874 A JP1488874 A JP 1488874A JP S5619733 B2 JPS5619733 B2 JP S5619733B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1488874A JPS5619733B2 (en) | 1974-02-07 | 1974-02-07 | |
| US05/495,678 US3984301A (en) | 1973-08-11 | 1974-08-08 | Sputter-etching method employing fluorohalogenohydrocarbon etching gas and a planar electrode for a glow discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1488874A JPS5619733B2 (en) | 1974-02-07 | 1974-02-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50109183A JPS50109183A (en) | 1975-08-28 |
| JPS5619733B2 true JPS5619733B2 (en) | 1981-05-09 |
Family
ID=11873541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1488874A Expired JPS5619733B2 (en) | 1973-08-11 | 1974-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5619733B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5552224A (en) * | 1978-10-13 | 1980-04-16 | Fujitsu Ltd | Sputter etching method |
| JPS60257523A (en) * | 1984-06-04 | 1985-12-19 | Ulvac Corp | Vacuum process device |
-
1974
- 1974-02-07 JP JP1488874A patent/JPS5619733B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50109183A (en) | 1975-08-28 |