JPS5619606A - Linear actuator - Google Patents

Linear actuator

Info

Publication number
JPS5619606A
JPS5619606A JP9462079A JP9462079A JPS5619606A JP S5619606 A JPS5619606 A JP S5619606A JP 9462079 A JP9462079 A JP 9462079A JP 9462079 A JP9462079 A JP 9462079A JP S5619606 A JPS5619606 A JP S5619606A
Authority
JP
Japan
Prior art keywords
actuators
guide
yoke
central
guide blocks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9462079A
Other languages
English (en)
Other versions
JPS6316884B2 (ja
Inventor
Isao Kimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9462079A priority Critical patent/JPS5619606A/ja
Publication of JPS5619606A publication Critical patent/JPS5619606A/ja
Publication of JPS6316884B2 publication Critical patent/JPS6316884B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/035—DC motors; Unipolar motors
    • H02K41/0352—Unipolar motors
    • H02K41/0354—Lorentz force motors, e.g. voice coil motors
    • H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H02K16/02—Machines with one stator and two or more rotors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Electromagnets (AREA)
JP9462079A 1979-07-25 1979-07-25 Linear actuator Granted JPS5619606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9462079A JPS5619606A (en) 1979-07-25 1979-07-25 Linear actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9462079A JPS5619606A (en) 1979-07-25 1979-07-25 Linear actuator

Publications (2)

Publication Number Publication Date
JPS5619606A true JPS5619606A (en) 1981-02-24
JPS6316884B2 JPS6316884B2 (ja) 1988-04-11

Family

ID=14115294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9462079A Granted JPS5619606A (en) 1979-07-25 1979-07-25 Linear actuator

Country Status (1)

Country Link
JP (1) JPS5619606A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1434335A3 (en) * 2002-12-27 2004-09-01 Canon Kabushiki Kaisha Alignment apparatus and exposure apparatus using the same
JP2015509259A (ja) * 2011-12-23 2015-03-26 アルストム テクノロジー リミテッドＡＬＳＴＯＭ Ｔｅｃｈｎｏｌｏｇｙ Ｌｔｄ 永久磁石を有する電磁アクチュエータおよびこのアクチュエータによって作動する機械的負荷遮断器

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1434335A3 (en) * 2002-12-27 2004-09-01 Canon Kabushiki Kaisha Alignment apparatus and exposure apparatus using the same
US6987335B2 (en) 2002-12-27 2006-01-17 Canon Kabushiki Kaisha Alignment apparatus and exposure apparatus using the same
US7075198B2 (en) 2002-12-27 2006-07-11 Canon Kabushiki Kaisha Alignment apparatus and exposure apparatus using the same
US7227284B2 (en) 2002-12-27 2007-06-05 Canon Kabushiki Kaisha Alignment apparatus and exposure apparatus using the same
EP1942573A1 (en) * 2002-12-27 2008-07-09 Canon Kabushiki Kaisha Alignment apparatus and exposure apparatus using the same
EP2149972A1 (en) * 2002-12-27 2010-02-03 Canon Kabushiki Kaisha Alignment apparatus and exposure apparatus using the same
JP2015509259A (ja) * 2011-12-23 2015-03-26 アルストム テクノロジー リミテッドＡＬＳＴＯＭ Ｔｅｃｈｎｏｌｏｇｙ Ｌｔｄ 永久磁石を有する電磁アクチュエータおよびこのアクチュエータによって作動する機械的負荷遮断器

Also Published As

Publication number Publication date
JPS6316884B2 (ja) 1988-04-11

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