JPS5619093B2 - - Google Patents

Info

Publication number
JPS5619093B2
JPS5619093B2 JP12092177A JP12092177A JPS5619093B2 JP S5619093 B2 JPS5619093 B2 JP S5619093B2 JP 12092177 A JP12092177 A JP 12092177A JP 12092177 A JP12092177 A JP 12092177A JP S5619093 B2 JPS5619093 B2 JP S5619093B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12092177A
Other languages
Japanese (ja)
Other versions
JPS5454579A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12092177A priority Critical patent/JPS5454579A/en
Publication of JPS5454579A publication Critical patent/JPS5454579A/en
Publication of JPS5619093B2 publication Critical patent/JPS5619093B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP12092177A 1977-10-11 1977-10-11 Exposure method Granted JPS5454579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12092177A JPS5454579A (en) 1977-10-11 1977-10-11 Exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12092177A JPS5454579A (en) 1977-10-11 1977-10-11 Exposure method

Publications (2)

Publication Number Publication Date
JPS5454579A JPS5454579A (en) 1979-04-28
JPS5619093B2 true JPS5619093B2 (en) 1981-05-06

Family

ID=14798277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12092177A Granted JPS5454579A (en) 1977-10-11 1977-10-11 Exposure method

Country Status (1)

Country Link
JP (1) JPS5454579A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192029A (en) * 1981-05-20 1982-11-26 Matsushita Electric Ind Co Ltd Mask set and positioning method for mask
JPS60133728A (en) * 1983-12-21 1985-07-16 Seiko Epson Corp Far ultraviolet ray projecting exposure device
US8664077B2 (en) * 2012-02-14 2014-03-04 Nanya Technology Corp. Method for forming self-aligned overlay mark

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619088Y2 (en) * 1975-08-25 1981-05-07

Also Published As

Publication number Publication date
JPS5454579A (en) 1979-04-28

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