JPS5617952Y2 - - Google Patents
Info
- Publication number
- JPS5617952Y2 JPS5617952Y2 JP2421675U JP2421675U JPS5617952Y2 JP S5617952 Y2 JPS5617952 Y2 JP S5617952Y2 JP 2421675 U JP2421675 U JP 2421675U JP 2421675 U JP2421675 U JP 2421675U JP S5617952 Y2 JPS5617952 Y2 JP S5617952Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2421675U JPS5617952Y2 (en:Method) | 1975-02-24 | 1975-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2421675U JPS5617952Y2 (en:Method) | 1975-02-24 | 1975-02-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51106218U JPS51106218U (en:Method) | 1976-08-25 |
| JPS5617952Y2 true JPS5617952Y2 (en:Method) | 1981-04-27 |
Family
ID=28120581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2421675U Expired JPS5617952Y2 (en:Method) | 1975-02-24 | 1975-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5617952Y2 (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5571027A (en) * | 1978-11-24 | 1980-05-28 | Hitachi Ltd | Continuous surface treatment apparatus |
| JPS5588335A (en) * | 1978-12-07 | 1980-07-04 | Kokusai Electric Co Ltd | Automatic conveying mechanism for plasma etching/ stripping device |
| JPS57117340A (en) * | 1981-11-05 | 1982-07-21 | Tokyo Ohka Kogyo Co Ltd | Improved plasma reaction treatment apparatus |
-
1975
- 1975-02-24 JP JP2421675U patent/JPS5617952Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51106218U (en:Method) | 1976-08-25 |