JPS5617952Y2 - - Google Patents

Info

Publication number
JPS5617952Y2
JPS5617952Y2 JP2421675U JP2421675U JPS5617952Y2 JP S5617952 Y2 JPS5617952 Y2 JP S5617952Y2 JP 2421675 U JP2421675 U JP 2421675U JP 2421675 U JP2421675 U JP 2421675U JP S5617952 Y2 JPS5617952 Y2 JP S5617952Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2421675U
Other languages
Japanese (ja)
Other versions
JPS51106218U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2421675U priority Critical patent/JPS5617952Y2/ja
Publication of JPS51106218U publication Critical patent/JPS51106218U/ja
Application granted granted Critical
Publication of JPS5617952Y2 publication Critical patent/JPS5617952Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP2421675U 1975-02-24 1975-02-24 Expired JPS5617952Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2421675U JPS5617952Y2 (cs) 1975-02-24 1975-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2421675U JPS5617952Y2 (cs) 1975-02-24 1975-02-24

Publications (2)

Publication Number Publication Date
JPS51106218U JPS51106218U (cs) 1976-08-25
JPS5617952Y2 true JPS5617952Y2 (cs) 1981-04-27

Family

ID=28120581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2421675U Expired JPS5617952Y2 (cs) 1975-02-24 1975-02-24

Country Status (1)

Country Link
JP (1) JPS5617952Y2 (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5571027A (en) * 1978-11-24 1980-05-28 Hitachi Ltd Continuous surface treatment apparatus
JPS5588335A (en) * 1978-12-07 1980-07-04 Kokusai Electric Co Ltd Automatic conveying mechanism for plasma etching/ stripping device
JPS57117340A (en) * 1981-11-05 1982-07-21 Tokyo Ohka Kogyo Co Ltd Improved plasma reaction treatment apparatus

Also Published As

Publication number Publication date
JPS51106218U (cs) 1976-08-25

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