JPS5616954B2 - - Google Patents

Info

Publication number
JPS5616954B2
JPS5616954B2 JP12725576A JP12725576A JPS5616954B2 JP S5616954 B2 JPS5616954 B2 JP S5616954B2 JP 12725576 A JP12725576 A JP 12725576A JP 12725576 A JP12725576 A JP 12725576A JP S5616954 B2 JPS5616954 B2 JP S5616954B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12725576A
Other languages
Japanese (ja)
Other versions
JPS5353044A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12725576A priority Critical patent/JPS5353044A/ja
Publication of JPS5353044A publication Critical patent/JPS5353044A/ja
Publication of JPS5616954B2 publication Critical patent/JPS5616954B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
JP12725576A 1976-10-25 1976-10-25 Plane heater Granted JPS5353044A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12725576A JPS5353044A (en) 1976-10-25 1976-10-25 Plane heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12725576A JPS5353044A (en) 1976-10-25 1976-10-25 Plane heater

Publications (2)

Publication Number Publication Date
JPS5353044A JPS5353044A (en) 1978-05-15
JPS5616954B2 true JPS5616954B2 (no) 1981-04-20

Family

ID=14955512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12725576A Granted JPS5353044A (en) 1976-10-25 1976-10-25 Plane heater

Country Status (1)

Country Link
JP (1) JPS5353044A (no)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587868A (ja) * 1981-07-07 1983-01-17 Nec Corp 半導体装置の製造方法
JPS5831574A (ja) * 1981-08-19 1983-02-24 Toshiba Corp 半導体装置及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587868A (ja) * 1981-07-07 1983-01-17 Nec Corp 半導体装置の製造方法
JPS5831574A (ja) * 1981-08-19 1983-02-24 Toshiba Corp 半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPS5353044A (en) 1978-05-15

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