JPS5353044A - Plane heater - Google Patents

Plane heater

Info

Publication number
JPS5353044A
JPS5353044A JP12725576A JP12725576A JPS5353044A JP S5353044 A JPS5353044 A JP S5353044A JP 12725576 A JP12725576 A JP 12725576A JP 12725576 A JP12725576 A JP 12725576A JP S5353044 A JPS5353044 A JP S5353044A
Authority
JP
Japan
Prior art keywords
plane heater
heater
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12725576A
Other languages
Japanese (ja)
Other versions
JPS5616954B2 (en
Inventor
Chieko Suma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP12725576A priority Critical patent/JPS5353044A/en
Publication of JPS5353044A publication Critical patent/JPS5353044A/en
Publication of JPS5616954B2 publication Critical patent/JPS5616954B2/ja
Granted legal-status Critical Current

Links

JP12725576A 1976-10-25 1976-10-25 Plane heater Granted JPS5353044A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12725576A JPS5353044A (en) 1976-10-25 1976-10-25 Plane heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12725576A JPS5353044A (en) 1976-10-25 1976-10-25 Plane heater

Publications (2)

Publication Number Publication Date
JPS5353044A true JPS5353044A (en) 1978-05-15
JPS5616954B2 JPS5616954B2 (en) 1981-04-20

Family

ID=14955512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12725576A Granted JPS5353044A (en) 1976-10-25 1976-10-25 Plane heater

Country Status (1)

Country Link
JP (1) JPS5353044A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587868A (en) * 1981-07-07 1983-01-17 Nec Corp Manufacture of semiconductor device
JPS5831574A (en) * 1981-08-19 1983-02-24 Toshiba Corp Semiconductor device and manufacture thereof

Also Published As

Publication number Publication date
JPS5616954B2 (en) 1981-04-20

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