JPS5616942B2 - - Google Patents
Info
- Publication number
- JPS5616942B2 JPS5616942B2 JP1499276A JP1499276A JPS5616942B2 JP S5616942 B2 JPS5616942 B2 JP S5616942B2 JP 1499276 A JP1499276 A JP 1499276A JP 1499276 A JP1499276 A JP 1499276A JP S5616942 B2 JPS5616942 B2 JP S5616942B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30457—Diamond
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Cold Cathode And The Manufacture (AREA)
- Electron Sources, Ion Sources (AREA)
- Prevention Of Electric Corrosion (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7501932A NL7501932A (nl) | 1975-02-19 | 1975-02-19 | Veldemissiebron. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51107756A JPS51107756A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-09-24 |
| JPS5616942B2 true JPS5616942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-04-20 |
Family
ID=19823210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1499276A Expired JPS5616942B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-02-19 | 1976-02-16 |
Country Status (8)
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7605820A (nl) * | 1976-05-31 | 1977-12-02 | Philips Nv | Elektronenstraalbuis met veldemissieelektronen- bron, veldemissieelektronenbron voor een der- gelijke elektronenstraalbuis en werkwijze voor de vervaardiging van een dergelijke veldemis- sieelektronenbron. |
| JP3131339B2 (ja) * | 1993-12-22 | 2001-01-31 | 三菱電機株式会社 | 陰極、陰極線管および陰極線管の作動方法 |
| CN105140088B (zh) * | 2015-07-24 | 2017-10-17 | 北京航空航天大学 | 大束流电子束打靶微束斑x射线源的聚焦装置及其使用方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL285235A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1961-11-08 | |||
| US3374386A (en) * | 1964-11-02 | 1968-03-19 | Field Emission Corp | Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder |
| FR1478071A (fr) * | 1965-04-30 | 1967-04-21 | Matsushita Electric Ind Co Ltd | Appareil pour former un faisceau d'électrons |
| US3665241A (en) * | 1970-07-13 | 1972-05-23 | Stanford Research Inst | Field ionizer and field emission cathode structures and methods of production |
-
1975
- 1975-02-19 NL NL7501932A patent/NL7501932A/xx not_active Application Discontinuation
-
1976
- 1976-02-06 DE DE19762604603 patent/DE2604603A1/de active Pending
- 1976-02-16 JP JP1499276A patent/JPS5616942B2/ja not_active Expired
- 1976-02-16 SE SE7601660A patent/SE7601660L/xx unknown
- 1976-02-16 GB GB5965/76A patent/GB1527022A/en not_active Expired
- 1976-02-17 ES ES445244A patent/ES445244A1/es not_active Expired
- 1976-02-17 AU AU11155/76A patent/AU1115576A/en not_active Expired
- 1976-02-19 FR FR7604539A patent/FR2301918A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| NL7501932A (nl) | 1976-08-23 |
| AU1115576A (en) | 1977-09-01 |
| FR2301918B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-08-31 |
| FR2301918A1 (fr) | 1976-09-17 |
| JPS51107756A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-09-24 |
| DE2604603A1 (de) | 1976-09-02 |
| GB1527022A (en) | 1978-10-04 |
| ES445244A1 (es) | 1977-06-01 |
| SE7601660L (sv) | 1976-08-20 |