JPS56166659U - - Google Patents
Info
- Publication number
- JPS56166659U JPS56166659U JP6502780U JP6502780U JPS56166659U JP S56166659 U JPS56166659 U JP S56166659U JP 6502780 U JP6502780 U JP 6502780U JP 6502780 U JP6502780 U JP 6502780U JP S56166659 U JPS56166659 U JP S56166659U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6502780U JPS56166659U (en) | 1980-05-14 | 1980-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6502780U JPS56166659U (en) | 1980-05-14 | 1980-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56166659U true JPS56166659U (en) | 1981-12-10 |
Family
ID=29659198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6502780U Pending JPS56166659U (en) | 1980-05-14 | 1980-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56166659U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0498746A (en) * | 1990-08-13 | 1992-03-31 | Hitachi Ltd | Charged particle beam device |
| JP2007019045A (en) * | 2003-09-10 | 2007-01-25 | Hitachi High-Technologies Corp | Small electron gun |
| JP2011044343A (en) * | 2009-08-21 | 2011-03-03 | Shimadzu Corp | Electron beam device |
| WO2021193369A1 (en) * | 2020-03-26 | 2021-09-30 | 国立研究開発法人物質・材料研究機構 | Electron gun chamber for scanning electron microscope, electron gun containing same, and scanning electron microscope |
-
1980
- 1980-05-14 JP JP6502780U patent/JPS56166659U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0498746A (en) * | 1990-08-13 | 1992-03-31 | Hitachi Ltd | Charged particle beam device |
| JP2007019045A (en) * | 2003-09-10 | 2007-01-25 | Hitachi High-Technologies Corp | Small electron gun |
| JP2011044343A (en) * | 2009-08-21 | 2011-03-03 | Shimadzu Corp | Electron beam device |
| WO2021193369A1 (en) * | 2020-03-26 | 2021-09-30 | 国立研究開発法人物質・材料研究機構 | Electron gun chamber for scanning electron microscope, electron gun containing same, and scanning electron microscope |