JPS56166450A - Method of and apparatus for spectrometric detection of various element on surface of solid - Google Patents

Method of and apparatus for spectrometric detection of various element on surface of solid

Info

Publication number
JPS56166450A
JPS56166450A JP5990881A JP5990881A JPS56166450A JP S56166450 A JPS56166450 A JP S56166450A JP 5990881 A JP5990881 A JP 5990881A JP 5990881 A JP5990881 A JP 5990881A JP S56166450 A JPS56166450 A JP S56166450A
Authority
JP
Japan
Prior art keywords
solid
various element
spectrometric detection
spectrometric
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5990881A
Other languages
English (en)
Inventor
Hintsu Edoaruto
Boogen Peeteru
Miodosutsueusukii Piitaa
Rusubiyuruto Dankuuaruto
Shiyuueeru Berunto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich GmbH filed Critical Kernforschungsanlage Juelich GmbH
Publication of JPS56166450A publication Critical patent/JPS56166450A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6402—Atomic fluorescence; Laser induced fluorescence
    • G01N21/6404—Atomic fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP5990881A 1980-04-22 1981-04-22 Method of and apparatus for spectrometric detection of various element on surface of solid Pending JPS56166450A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803015352 DE3015352A1 (de) 1980-04-22 1980-04-22 Verfahren und vorrichtung zum spektoskopischen naschweis von an der oberflaeche eines festkoerpers befindlichen elementen

Publications (1)

Publication Number Publication Date
JPS56166450A true JPS56166450A (en) 1981-12-21

Family

ID=6100598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5990881A Pending JPS56166450A (en) 1980-04-22 1981-04-22 Method of and apparatus for spectrometric detection of various element on surface of solid

Country Status (3)

Country Link
EP (1) EP0038549A1 (ja)
JP (1) JPS56166450A (ja)
DE (1) DE3015352A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2160014B (en) * 1983-12-23 1987-12-16 Stanford Res Inst Int Method and apparatus for surface diagnostics
DD275738A1 (de) * 1988-09-23 1990-01-31 Akad Wissenschaften Ddr Verfahren und vorrichtung zum selektiven nachweis von analytatomen
EP0396291B1 (en) * 1989-04-29 1994-11-30 FISONS plc Apparatus and methods for optical emission spectroscopy
JPH0676967B2 (ja) * 1989-06-08 1994-09-28 株式会社島津製作所 発光分析装置
DE102022201924A1 (de) 2022-02-24 2023-08-24 Forschungszentrum Jülich GmbH Vakuumanlage und Detektionseinrichtung

Also Published As

Publication number Publication date
DE3015352A1 (de) 1981-11-05
EP0038549A1 (de) 1981-10-28

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