JPS5616543B2 - - Google Patents

Info

Publication number
JPS5616543B2
JPS5616543B2 JP1571078A JP1571078A JPS5616543B2 JP S5616543 B2 JPS5616543 B2 JP S5616543B2 JP 1571078 A JP1571078 A JP 1571078A JP 1571078 A JP1571078 A JP 1571078A JP S5616543 B2 JPS5616543 B2 JP S5616543B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1571078A
Other versions
JPS54108581A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1571078A priority Critical patent/JPS54108581A/ja
Publication of JPS54108581A publication Critical patent/JPS54108581A/ja
Publication of JPS5616543B2 publication Critical patent/JPS5616543B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP1571078A 1978-02-13 1978-02-13 Electron-beam exposure device Granted JPS54108581A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1571078A JPS54108581A (en) 1978-02-13 1978-02-13 Electron-beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1571078A JPS54108581A (en) 1978-02-13 1978-02-13 Electron-beam exposure device

Publications (2)

Publication Number Publication Date
JPS54108581A JPS54108581A (en) 1979-08-25
JPS5616543B2 true JPS5616543B2 (ja) 1981-04-16

Family

ID=11896315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1571078A Granted JPS54108581A (en) 1978-02-13 1978-02-13 Electron-beam exposure device

Country Status (1)

Country Link
JP (1) JPS54108581A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5895370U (ja) * 1981-12-22 1983-06-28 井関農機株式会社 移動車に於ける操作装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760841A (en) * 1980-09-30 1982-04-13 Toshiba Corp Exposure device for electron beam

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105381A (ja) * 1974-01-28 1975-08-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105381A (ja) * 1974-01-28 1975-08-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5895370U (ja) * 1981-12-22 1983-06-28 井関農機株式会社 移動車に於ける操作装置

Also Published As

Publication number Publication date
JPS54108581A (en) 1979-08-25

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