JPS5616542B2 - - Google Patents

Info

Publication number
JPS5616542B2
JPS5616542B2 JP1236678A JP1236678A JPS5616542B2 JP S5616542 B2 JPS5616542 B2 JP S5616542B2 JP 1236678 A JP1236678 A JP 1236678A JP 1236678 A JP1236678 A JP 1236678A JP S5616542 B2 JPS5616542 B2 JP S5616542B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1236678A
Other languages
Japanese (ja)
Other versions
JPS54105967A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1236678A priority Critical patent/JPS54105967A/ja
Publication of JPS54105967A publication Critical patent/JPS54105967A/ja
Publication of JPS5616542B2 publication Critical patent/JPS5616542B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1236678A 1978-02-08 1978-02-08 Defect test system for pattern featuring directivity Granted JPS54105967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1236678A JPS54105967A (en) 1978-02-08 1978-02-08 Defect test system for pattern featuring directivity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1236678A JPS54105967A (en) 1978-02-08 1978-02-08 Defect test system for pattern featuring directivity

Publications (2)

Publication Number Publication Date
JPS54105967A JPS54105967A (en) 1979-08-20
JPS5616542B2 true JPS5616542B2 (enrdf_load_stackoverflow) 1981-04-16

Family

ID=11803262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1236678A Granted JPS54105967A (en) 1978-02-08 1978-02-08 Defect test system for pattern featuring directivity

Country Status (1)

Country Link
JP (1) JPS54105967A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806209A1 (de) * 1987-02-27 1988-09-08 Mitsubishi Electric Corp Strukturdefekt-erfassungssystem

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56117106A (en) * 1980-02-20 1981-09-14 Dainippon Printing Co Ltd Inspecting device for pattern defect
JPS572522A (en) * 1980-06-05 1982-01-07 Dainippon Printing Co Ltd Defect inspecting device for regular pattern
JPS58158921A (ja) * 1982-03-16 1983-09-21 Dainippon Printing Co Ltd 規則性パタ−ンの欠陥検査装置
FR2706048B1 (fr) * 1993-06-04 1995-08-04 Marelli Autronica Collimateur facilement contrôlable.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806209A1 (de) * 1987-02-27 1988-09-08 Mitsubishi Electric Corp Strukturdefekt-erfassungssystem

Also Published As

Publication number Publication date
JPS54105967A (en) 1979-08-20

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